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Huang, Chichen; Khandare, Shubham P; Kothapalli, Sri-Rajasekhar; Tadigadapa, Srinivas (, IEEE Sensors Letters)Ultrasound has been extensively used and investigated in medical applications, such as medical imaging [1] and drug delivery [2], because of advantages such as noninvasiveness, good penetration, good sensitivity, and ease of use. Prior to the development of piezoelectric micromachined ultrasound transducers (pMUTs), conventional transducers were made of piezoelectric ceramics, such as lead zirconate titanate [3]. These materials when operated in thickness mode exhibit a large impedance mismatch between the transducer surface and medium resulting in lower bandwidth unless augmented with one or more matching layers. With the development of MEMS technology, improvements in MUTs have been realized in several aspects, such as wide bandwidth without the addition of matching layers [4], smaller cell size, therefore higher operating frequency and better resolution, and easier fabrication of large arrays at lower cost [5]. Despite lower electromechanical coupling coefficient, the low-power consumption feature makes pMUTs good candidates for a variety of applications, including intrabody communication [6] and fingerprint sensing [7].more » « less
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